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MEMS Mass Flow Sensors - FS4001

? Flow Range: 0 ~ 30, 100, 200, 500, 1000, or customer specified sccm
? Turn-down Ratio: >100:1
? Accuracy: ±(1.5 + 0.5 FS)%
? Repeatability: ± 0.25%Reading
? Null Shift: ±30mV
? Output Shift: ± 0.2%/°C
? Response Time: 65ms (Default, 4, 8, 16, 33, 131 selectable)

Model Number: FS4001
Data Sheet:

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Product Specification

FS4001 MEMS Mass Flow Sensors Description

FS4001 series mass flow sensors are manufactured using MEMS flow sensor and package technology. The sensors are specially designed for low flow rate range applications from 0 ~ 30 sccm up to 0 ~ 1000 sccm. The maximum flow rate for each model is manufactured via specially designed package as well as smart electronics so that the optimal sensitivity would be achieved.

FS4001 MEMS Mass Flow Sensors Features
- Low mass flow range from 0 ~ 30 sccm up to 0 ~ 1000 sccm
- Outstanding accuracy of ±1.5 %
- Fast response (4 ms selectable)
- Pressure rating up to 5 bar (73 psi)
- Analog and/or digital user interface
- Easy installation

FS4001 MEMS Mass Flow Sensors Mechanical Dimensions

FS4001 MEMS Mass Flow Sensors Performance Specifications
All data unless otherwise noted apply for calibration conditions: air, 20°C, 101.325kPa absolute pressure, horizontal mounting.

Model	FS4001	unit
Flow Range	0 ~ 30, 100, 200, 500, 1000, or customer specified	sccm
Turn-down Ratio	>100:1
Accuracy	±(1.5 + 0.5 FS)	%
Repeatability	± 0.25	%Reading
Null Shift	± 30	mV
Output Shift	± 0.2	%/°C
Response Time	65 (Default, 4, 8, 16, 33, 131 selectable)	ms
Output	Linear: RS232, Analog 0.5 ~ 4.5 Vdc
Pressure Drop	< 30	Pa
Pressure Range	-0.08 ~ +0.5	MPa
Power Supply	8 ~ 24 Vdc, 50 mA
Operating Current	20 typical when RS232 not connected	mA
Operating Current	25 typical when RS232 communicates with a PC	mA
Power Consumption	<200	mW
Working Temperature	-5 ~ +55	°C