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Miniature SMD Pressure Sensors - MS54xx

? 1, 7, 12, and 70 bar absolute pressure range
? Uncompensated
? Piezoresistive silicon micromachined sensor
? Miniature surface mount
? Ceramic carrier
? Low noise, high sensitivity, high linearity
? Small size
? High reliability, low drift
? -40 °C to +125 °C operation range

Model Number: MS54xx
Data Sheet:

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Product Specification

MS54xx Miniature SMD Pressure Sensors Description:
The MS54xx SMD pressure sensor series is designed for pressure sensor systems with highest demands on resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 6.2 x 6.4 mm ceramic carrier or a 6.1 x 6.3 mm PCB protected by a metal or plastic cap. The MS54xx can be delivered in a high sensitivity version giving a maximal output voltage or in a high linearity version. Both versions provide an output voltage directly proportional to the applied pressure.

Carrier	Full scale pressure	High Sensitivity Versions			High Linearity Versions
Carrier	Full scale pressure	Product code	Full scale span	Linearity	Product code	Full scale span	Linearity
Ceramic	1 bar	MS5401-AM	240 mV	±0.20 % FS	MS5401-BM	150 mV	±0.05 % FS
	7 bar	MS5407-AM	392 mV	±0.20 % FS
	12 bar				MS5412-BM	150 mV	±0.05 % FS
	70 bar	MS5470-AM	310 mV	±0.25 % FS

MS54xx Miniature SMD Pressure Sensors Features:
? 1, 7, 12, and 70 bar absolute pressure range
? Uncompensated
? Piezoresistive silicon micromachined sensor
? Miniature surface mount
? Ceramic carrier
? Low noise, high sensitivity, high linearity
? Low cost SMD package
? Small size
? High reliability, low drift
? -40 °C to +125 °C operation range
? Gel protection against humidity and water

MS54xx Miniature SMD Pressure Sensors Applications:
? Brake systems
? High resolution altimeters, variometer
? Barometers
? Engine management
? Waterproof watches and diving computers

MS54xx Miniature SMD Pressure Sensors Electrical Characteristics
HIGH SENSITIVITY VERSIONS
(Vs+ = 5 V; Ta = 25 °C)

	Parameter	Min	Typ	Max	Unit
MS5401-AM	Operating pressure range	0	-	1	bar
	Full-scale span (FS)	190	240	290	mV
	Sensitivity	190	240	290	mV/bar
	Linearity	-	±0.15	±0.40	% FS
MS5407-AM	Operating pressure range	0	-	7	bar
	Full-scale span (FS)	322	392	462	mV
	Sensitivity	46	56	66	mV/bar
	Linearity		±0.15	±040	% FS
MS5470-AM	Operating pressure range	0	-	70	bar
	Full-scale span (FS)	250	310	370	mV
	Sensitivity	3.6	4.4	5.3	mV/bar
	Linearity		±0.25	±0.50	% FS
All Ranges	Operating temperature range	-40	-	125	°C
	Zero pressure offset	-40	0	40	mV
	Pressure hysteresis	-	-	±0.20	% FS
	Temperature hysteresis	-	0.3	0.8	% FS
	Repeatability	-	-	±0.20	% FS
	Bridge resistance	3.0	3.4	3.8	kΩ
	Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset	+2'400 -1'500 -80	2'900 -1'900 -	+3'300 -2'300 +80	ppm/°C ppm/°C μV/°C

HIGH LINEARITY VERSIONS
(Vs+ = 5 V; Ta = 25 °C)

	Parameter	Min	Typ	Max	Unit
MS5401-BM	Operating pressure range	0	-	1	bar
	Full-scale span (FS)	120	150	180	mV
	Sensitivity	120	150	180	mV/bar
	Linearity	-	±0.05	±0.20	% FS
MS5412-BM	Operating pressure range	0	-	12	bar
	Full-scale span (FS)	120	150	180	mV
	Sensitivity	10	12.5	15	mV/bar
	Linearity		±0.05	±0.15	% FS
All Ranges	Operating temperature range	-40	-	125	°C
	Zero pressure offset	-40	0	40	mV
	Pressure hysteresis	-	-	±0.20	% FS
	Temperature hysteresis	-	0.3	0.8	% FS
	Repeatability	-	-	±0.20	% FS
	Bridge resistance	3.0	3.4	3.8	kΩ
	Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset	+2'400 -1'500 -80	2'900 -1'900 -	+3'300 -2'300 +80	ppm/°C ppm/°C μV/°C

MS54xx Miniature SMD Pressure Sensors Ordering Information

Product code	Product	Art. No	Package	Delivery Form
MS5401-AM	Miniature pressure sensor 1 bar, High sensitivity	325401001-00	Ceramic carrier	Tube
		325401001-50	Ceramic carrier	Tape and Reel
		325401006-00	Ceramic carrier, without transparent gel	Tube
MS5401-BM	Pressure sensor 1 bar, High linearity	325401000-00	Ceramic carrier	Tube
		325401000-50	Ceramic carrier	Tape and Reel
		325401002-00	Ceramic carrier, without transparent gel	Tube
MS5407-AM	Miniature pressure sensor 7 bar, High sensitivity	325407000-00	Ceramic carrier	Tube
		325407000-50	Ceramic carrier	Tape and Reel
		325407001-00	Ceramic carrier, without transparent gel	Tube
MS5412-BM	Pressure sensor 12 bar, High linearity	325412000-00	Ceramic carrier	Tube
MS5412-BM	Pressure sensor 12 bar, High linearity	325412000-50	Ceramic carrier	Tape and Reel
MS5470-AM	Miniature pressure sensor 70 bar, High sensitivity	325470000-00	Ceramic carrier	Tube